Performance Verification E0,MPE : maximum permissible E : 150,MPE maximum permissible R0,MPL: maximum permissible error of length measurement error of length limit of the repeatability range 5 gauges have to be measured 3 5 length gauges have to be Extreme value of the repeatabi- times with one probing at each measured 3 times in the YZ- or lity range of the length measu- end, in 7 different directions. All XZ plane with opposite styli, rement error, calculated by three measuring results must be within mounted 150 mm off the Z repeated measurements on each E0. spindle axis. size for a total of 35 values. The 35 repeatability range results must be within the specified PFTU,MPE : maximum permissible MPETHP/t: maximum permissible R0,MPL. single stylus form error scanning probing error A precision sphere has to be A precision sphere has to be measured with 25 probings. PFTU scanned with 4 defined lines. THP is the range of all radii. is the range of all radii. PFTU = Rmax - Rmin = sphere form. THP = Rmax - Rmin = sphere form, Calibration sphere in the middle scanning. Calibration sphere in of the volume. the middle of the volume. Technical Characteristics Mechanical Frame: X: Micromachined anodized light alloy extrusion Y: Integral dovetail guideways, machined into the table Z: Micromachined anodized light alloy extrusion Surface Plate: Material: Granite Part Locking: threaded inserts M8 x 1.25 Flatness: according to DIN 876/III Sliding System: Air bearings on all axes Measuring System: METALLUR® linear scales. System Resolution: 0.039 μm Temperature Compensation: Structural multi-sensor temperature compensation Ram Counterbalance: Pneumatic, adjustable Bellows and Covers: X and Y air bearing guideways with bellows Air Supply: Minimum air supply pressure: 0.5 MPa Air consumption: 150 Nl/min Environment: Metrological specification temperature range: 18 ÷ 22 °C; 16 ÷ 26 °C; 15 ÷ 30 °C Operating temperature: 10 ÷ 40 °C Relative humidity: 20% - 90 % non condensing Probe Heads and Sensors: HH-A, HH-AS8, HP-S-X1C, HP-S-X3C, HP-S-X5 TP200, HP-T, HP-TM, HP-S-X1, HP-L-10.6T DEA GLOBAL SILVER SF | DS CMM 037/02 - EN - 07/14 7